THS Series Passive Vibration Isolator

THS series vibration isolators are mainly used in semiconductor, panel, optical equipment,
3C equipment, 5G related equipment and inspection equipment to minimize the stabilization time required to effectively provide vibration damping and attenuation performance, and therefore can be used in platforms moving at different speeds and loads.

Through the integration of years of technology and knowledge accumulation, we can quickly launch high-quality one-stop microvibration solutions for the high-end manufacturing industry by focusing on customer needs.

 

► THS Series Vibration Isolator
• THS1 series is a basic pneumatic vibration isolator with bellows air springs,which is simple in design
   and provide basic isolation performance in both horizontal and vertical at low cost .
• THS2 series is a standard pneumatic vibration isolator offer fast settling time and excellent
   isolation performance with its special interior structures.
THS3 is multi-directional ball-type design makes the natural frequency of the vibration isolation
   system lower,thus results in better performance in both vertical and horizontal direction. For better
   repeatability
, precision leveling valves of 0.05mm should be installed.THS3 series can be used with
   external oil damper, it will shorten the settling time of the moving platform and increase the stiffness
   of the system.

• THS4 engthened type Vibration Isolator better damping and attenuation performance due to its
   larger internal damping chamber space, and the stability time is much better than that of the optical
   platform.
• THS5 use of durable air bag type air spring, lock design, excellent air tightness. One inflation can be
   used for more than half a year, without the use of external air source.